Piping Systems for High Purity Deionized Water

From: <Thomas>
Date: Fri May 17 2002 - 16:02:00 EDT

Gents:

Have been given a project involving high purity water used for washing integrated circuits. Looking for some advice:

1>What piping systems are generally used? Existing system is a hodgepodge of PVDF and PVC.
2>Can anyone recommend standards or specifications? 3>Can anyone recommend good reference material?

Thank you in advance for your help. Received on Fri May 17 16:02:00 2002

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